Study of Self-Heating Phenomena in Si Nano Wire MOS Transistor

Tetsuo ENDOH

IEICE TRANSACTIONS on Electronics   Vol.E92-C    No.5    pp.598-602
Publication Date: 2009/05/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E92.C.598
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
nano wire MOS transistor,  self-heating effect,  temperature,  nano,  

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In this study, I have numerically investigated the temperature distribution of n-type Si Nano Wire MOS Transistor induced by the self-heating effect by using a 3-D device simulator. The dependencies of temperature distribution within the Si Nano Wire MOS Transistor on both its gate length and width of the Si nano wire were analyzed. First, it is shown that the peak temperature in Si Nano Wire MOS Transistor increases by 100 K with scaling the gate length from 54 nm to 14 nm in the case of a 50 nm width Si nano wire. Next, it is found that the increase of its peak temperature due to scaling the gate length can be suppressed by scaling the size of the Si nano wire, for the first time. The peak temperature suppresses by 160 K with scaling the Si nano wire width from 50 nm to 10 nm in the case of a gate length of 14 nm. Furthermore, the heat dissipation in the gate, drain, and source direction are analyzed, and the analytical theory of the suppression of the temperature inside Si Nano Wire MOSFET is proposed. This study shows very useful results for future Si Nano Wire MOS Transistor design for suppressing the self-heating effect.