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Optical Microsensors Integration Technologies for Biomedical Applications
Eiji HIGURASHI Renshi SAWADA Tadatomo SUGA
IEICE TRANSACTIONS on Electronics
Publication Date: 2009/02/01
Online ISSN: 1745-1353
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Section on Recent Advances in Integrated Photonic Devices)
microsensors, hybrid integration, passive alignment, low temperature bonding, laser Doppler flowmetry,
Full Text: FreePDF
This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.