Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering

Kenta MIURA  Hiroki MIYAZAKI  Osamu HANAIZUMI  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E91-C   No.10   pp.1669-1672
Publication Date: 2008/10/01
Online ISSN: 1745-1353
DOI: 10.1093/ietele/e91-c.10.1669
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
tantalum oxide,  sputtering,  annealing,  blue-light emission,  

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Summary: 
We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency magnetron sputtering after annealing. The maximum peak intensity of the photoluminescence was observed from a sample annealed at 600 for 20 min, and the peak wavelength was approximately 430 nm. Tantalum oxide films that emit blue light may be useful materials for novel active optical devices utilizing Ta2O5/SiO2 multilayered photonic crystals.