A Compact Semi-Lumped Coplanar Waveguide Low-Pass Filter Fabricated on High Resistivity Silicon Substrate

Cheng-Yuan HUNG
Ru-Yuan YANG
Min-Hang WENG
Yan-Kuin SU

IEICE TRANSACTIONS on Electronics   Vol.E90-C    No.9    pp.1837-1840
Publication Date: 2007/09/01
Online ISSN: 1745-1353
DOI: 10.1093/ietele/e90-c.9.1837
Print ISSN: 0916-8516
Type of Manuscript: LETTER
Category: Microwaves, Millimeter-Waves
coplanar waveguide,  low-pass filter,  high resistivity silicon,  cutoff frequency,  group delay,  

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In this letter, the fabrication of a compact and high performance semi-lumped coplanar waveguide low-pass filter (CPW-LPF) on high resistivity silicon (HRS) substrate at millimeter wave is proposed. The design procedure and the equivalent circuit of the proposed semi-lumped CPW-LPF is discussed. The filter structure of is very simple but its performances is fairly good. This designed filter at cutoff frequency fc of 31 GHz has very good measured characteristics including the low insertion loss, sharp rejection and low group delay, due to the reduced substrate loss of HRS. Experimental results of the fabricated filter show a good agreement with the predicted results.