A Test Structure to Analyze Electrical CMOSFET Reliabilities between Center and Edge along the Channel Width

Takashi OHZONE  Eiji ISHII  Takayuki MORISHITA  Kiyotaka KOMOKU  Toshihiro MATSUDA  Hideyuki IWATA  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E90-C   No.2   pp.515-522
Publication Date: 2007/02/01
Online ISSN: 1745-1353
DOI: 10.1093/ietele/e90-c.2.515
Print ISSN: 0916-8516
Type of Manuscript: PAPER
Category: Semiconductor Materials and Devices
Keyword: 
CMOSFET,  reliability,  LDD-type,  channel width,  isolation,  

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Summary: 
A test structure to separately analyze the location where the hot-carrier-induced CMOSFET reliability is determined around the center or the isolation-edge along the channel-width was proposed and fabricated. The test structure has four kinds of MOSFETs; [A] and [D] MOSFETs with a short and a long channel-length all over the channel width, respectively, [B] MOSFET with the short and the long channel-length around the center and the both isolation-edges, respectively, and [C] MOSFET with the channel-length regions vice versa to the [B] MOSFET. The time dependent changes of the threshold voltages VT, the saturation currents IS, the linear currents IL and the maximum transconductances β up to 50,000 s were measured. All data for the wide channel-width MOSFETs were almost categorized into three; [A], [B]/[C] and [D]. The [B]/[C] data were well estimated from simple theoretical discussions by the combination of [A] and [D] data, which mean that the reliabilities are nearly the same around the center or the isolation-edge for the CMOSFETs.