Ridge-Type Zn-Indiffused Mach-Zehnder Modulator in LiNbO3

Ruey-Ching TWU  Chia-Chih HUANG  Way-Seen WANG  

IEICE TRANSACTIONS on Electronics   Vol.E90-C   No.2   pp.481-483
Publication Date: 2007/02/01
Online ISSN: 1745-1353
DOI: 10.1093/ietele/e90-c.2.481
Print ISSN: 0916-8516
Type of Manuscript: Special Section LETTER (Special Section on Evolution of Microwave and Millimeter-Wave Photonics Technology)
Zn-indiffused waveguide,  Mach-Zehnder modulator,  ridge structure,  

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A ridge-type Zn-indiffused Mach-Zehnder modulator operating at 1.55 µm wavelength is demonstrated on a z-cut LiNbO3 substrate for the first time. The measured results show that the values of voltage-length product can be reduced from 9.6 V-cm to 8.1 V-cm with the etched depth of 1.7 µm.