For Full-Text PDF, please login, if you are a member of IEICE,|
or go to Pay Per View on menu list, if you are a nonmember of IEICE.
Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser
Masahiro ISHIMORI Minoru SASAKI Kazuhiro HANE
IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Online ISSN: 1745-1353
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
micromirror, tunable laser diode, Littman configuration, vertical comb drive, wafer bending,
Full Text: PDF>>
A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.