Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser

Masahiro ISHIMORI  Minoru SASAKI  Kazuhiro HANE  

IEICE TRANSACTIONS on Electronics   Vol.E90-C   No.1   pp.72-77
Publication Date: 2007/01/01
Online ISSN: 1745-1353
DOI: 10.1093/ietele/e90-c.1.72
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
micromirror,  tunable laser diode,  Littman configuration,  vertical comb drive,  wafer bending,  

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A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.