Photonic Crystal Waveguide Switches with Movable Slabs

Kazuhiro HANE  Ken-ichi UMEMORI  Yoshiaki KANAMORI  

IEICE TRANSACTIONS on Electronics   Vol.E90-C   No.1   pp.51-58
Publication Date: 2007/01/01
Online ISSN: 1745-1353
DOI: 10.1093/ietele/e90-c.1.51
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Section on Microoptomechatronics)
MEMS,  optical switch,  photonic crystal,  microactuator,  

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Photonic crystal waveguide switches with movable micro-electro-mechanical actuators are proposed and fabricated by silicon micromachining. The switch structure consists of in-line input and output photonic crystal waveguide slabs, and a switching slab to bridge the gap between the waveguides. By driving the switching slab with a micro electro-mechanical actuator, the transmission between the waveguides is modulated. For driving the slabs, two kinds of actuator, i.e., vertical and parallel motion actuators are proposed for the respective switches. The switching characteristics are also investigated by calculations using the finite-difference time-domain method.