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Microoptomechatronics: An Overview
IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Online ISSN: 1745-1353
Print ISSN: 0916-8516
Type of Manuscript: INVITED REVIEW PAPER
microoptomechatronics, micromachine, nanomechatronics, nanomachine, MEMS, NEMS,
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A historical overview of microoptomechatronics technologies is presented for positioning of microoptomechatronics, accompanied with a future view based on the current state of art nanotechnologies. How the technologies have been developed for realizing practical precision and information devices based on optics or photonics is also mentioned, citing a few examples.