Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications

Shinji MATSUI  Reo KOMETANI  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E90-C   No.1   pp.25-35
Publication Date: 2007/01/01
Online ISSN: 1745-1353
DOI: 10.1093/ietele/e90-c.1.25
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Section on Microoptomechatronics)
Category: 
Keyword: 
FIB-CVD,  3-D structure,  device,  bio-tool,  

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Summary: 
Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga+ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C14H10) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 µm external diameter and 12 µm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-space-wiring with 0.1 µm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.