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Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer
Minoru SASAKI Masahiro ISHIMORI JongHyeong SONG Kazuhiro HANE
IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Online ISSN: 1745-1353
Print ISSN: 0916-8516
Type of Manuscript: Special Section LETTER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
micromirror, tuning, vertical comb, wafer bending,
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An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.