An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography

Zhen MA  David M. KLYMYSHYN  Sven ACHENBACH  Martin BORNER  Nina DAMBROWSKY  Jurgen MOHR  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E90-C   No.12   pp.2192-2197
Publication Date: 2007/12/01
Online ISSN: 1745-1353
DOI: 10.1093/ietele/e90-c.12.2192
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Recent Technologies for Microwave and Millimeter-wave Passive Devices)
Category: 
Keyword: 
cavity resonators,  micromachining,  RF MEMS,  X-ray lithography,  high Q,  

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Summary: 
An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal electroforming to produce a 24-GHz cavity resonator. The metal cavity is 1.8 mm deep and has impressive structure, including extremely vertical and smooth sidewalls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89 GHz.