For Full-Text PDF, please login, if you are a member of IEICE,|
or go to Pay Per View on menu list, if you are a nonmember of IEICE.
An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography
Zhen MA David M. KLYMYSHYN Sven ACHENBACH Martin BORNER Nina DAMBROWSKY Jurgen MOHR
IEICE TRANSACTIONS on Electronics
Publication Date: 2007/12/01
Online ISSN: 1745-1353
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Recent Technologies for Microwave and Millimeter-wave Passive Devices)
cavity resonators, micromachining, RF MEMS, X-ray lithography, high Q,
Full Text: PDF(706KB)>>
An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal electroforming to produce a 24-GHz cavity resonator. The metal cavity is 1.8 mm deep and has impressive structure, including extremely vertical and smooth sidewalls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89 GHz.