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Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis
Takuichi HIRANO Kimio SAKURAI Jiro HIROKAWA Makoto ANDO Tetsuya IDE Atsushi SASAKI Kazufumi AZUMA Yukihiko NAKATA
IEICE TRANSACTIONS on Communications
Publication Date: 2006/05/01
Online ISSN: 1745-1345
Print ISSN: 0916-8516
Type of Manuscript: PAPER
Category: Antennas and Propagation
slotted waveguide arrays, unit cell, plasma, generalized scattering matrix method, method of moments, baffles,
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The authors have proposed a 1 m2 single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.