Formula-Based Method for Capacitance Extraction of Interconnects with Dummy Fills

Atsushi KUROKAWA  Akira KASEBE  Toshiki KANAMOTO  Yun YANG  Zhangcai HUANG  Yasuaki INOUE  Hiroo MASUDA  

IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences   Vol.E89-A   No.4   pp.847-855
Publication Date: 2006/04/01
Online ISSN: 1745-1337
DOI: 10.1093/ietfec/e89-a.4.847
Print ISSN: 0916-8508
Type of Manuscript: Special Section PAPER (Special Section on Selected Papers from the 18th Workshop on Circuits and Systems in Karuizawa)
dummy fill,  capacitance extraction,  capacitance formula,  interconnect,  

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In advanced ASIC/SoC physical designs, interconnect parasitic extraction is one of the important factors to determine the accuracy of timing analysis. We present a formula-based method to efficiently extract interconnect capacitances of interconnects with dummy fills for VLSI designs. The whole flow is as follows: 1) in each process, obtain capacitances per unit length using a 3-D field solver and then create formulas, and 2) in the actual design phase, execute a well-known 2.5-D capacitance extraction. Our results indicated that accuracies of the proposed formulas were almost within 3% error. The proposed formula-based method can extract interconnect capacitances with high accuracy for VLSI circuits. Moreover, we present formulas to evaluate the effect of dummy fills on interconnect capacitances. These can be useful for determining design guidelines, such as metal density before the actual design, and for analyzing the effect of each structural parameter during the design phase.