Si-Substrate Modeling toward Substrate-Aware Interconnect Resistance and Inductance Extraction in SoC Design

Toshiki KANAMOTO  Tatsuhiko IKEDA  Akira TSUCHIYA  Hidetoshi ONODERA  Masanori HASHIMOTO  

Publication
IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences   Vol.E89-A   No.12   pp.3560-3568
Publication Date: 2006/12/01
Online ISSN: 1745-1337
DOI: 10.1093/ietfec/e89-a.12.3560
Print ISSN: 0916-8508
Type of Manuscript: Special Section PAPER (Special Section on VLSI Design and CAD Algorithms)
Category: Interconnect
Keyword: 
substrate,  interconnect,  resistance,  inductance,  SoC,  

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Summary: 
This paper proposes a simple yet sufficient Si-substrate modeling for interconnect resistance and inductance extraction. The proposed modeling expresses Si-substrate as four filaments in a filament-based extractor. Although the number of filaments is small, extracted loop inductances and resistances show accurate frequency dependence resulting from the proximity effect. We experimentally prove the accuracy using FEM (Finite Element Method) based simulations of electromagnetic fields. We also show a method to determine optimal size of the four filaments. The proposed model realizes substrate-aware extraction in SoC design flow.