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RFCV Test Structure Design for a Selected Frequency Range
Wutthinan JEAMSAKSIRI Abdelkarim MERCHA Javier RAMOS Stefaan DECOUTERE Florence CUBAYNES
IEICE TRANSACTIONS on Electronics
Publication Date: 2005/05/01
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Microelectronic Test Structures)
capacitance, CV, gate dielectric, impedance, MOSFET, nitride, oxide, RF, S-parameters,
Full Text: PDF(881.3KB)>>
The problems with the CV characterization on very leaky (thin) nitrided oxide are mainly due to the measurement precision and MOS gate dielectric model accuracy. By doing S-parameter measurement at RF frequency and using simple but reasonably accurate model, we can obtain proper CV curves for very thin nitrided gate dielectrics. Regarding the measurement frequency we propose a systematic method to find a frequency range in which we can select measurement frequencies for all biases to obtain a full CV curve. Moreover, we formulated the first order relationship between the measurement frequency range and the test structure design for CV characterization. With the established formulae, we redesigned the test structures and verified that the formulae can be used as a guideline for the test structure design for RFCV measurements.