Summary: Electromagnetic field probes inevitably disturb the original distribution of the field when they are positioned close to a device. This disturbance in turn affects measurement accuracy and device operation. We developed an optical magnetic field probe, comprising a loop antenna element and an electro-optic crystal, for highly accurate magnetic near-field measurement in the GHz frequency range. We analyzed the invasiveness of the optical magnetic field probe quantitatively both experimentally and using finite difference time domain simulation. We found that eliminating the metal cable reduced the disturbance of the surrounding field that was to be measured. In addition, we investigated the magnetic field detection characteristics of the probe and its influence on the operation of a microstrip line. The optical magnetic field probe was less invasive and provided more accurate measurement.