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The 3D Measurement and Analysis of High Precision Surfaces Using Con-Focal Optical Methods
John McBRIDE Christian MAUL
IEICE TRANSACTIONS on Electronics
Publication Date: 2004/08/01
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Section on IS-EMD2003--Recent Technical Trend of Electro-Mechanical Devices)
3D surface scanning, micro-metrology, MEMS, contact erosion, con-focal methods,
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The paper reviews methods for the measurement and analysis of high precision surfaces. A number of measurement techniques are discussed with the emphasis on the application of con-focal methods. The various techniques are compared in terms of measurement times, data density, and the ability to detect near vertical surfaces, and steps. The two sensing methods discussed are the auto-focus laser method and the white light methods. Particular applications considered are in the measurement of eroded electrical contact surfaces, spherical and near spherical surfaces, and MEMS. The particular emphasis here is on the metrology of such surfaces and devices and methods for the assessment of complex micro-machined surfaces. The paper points to a number of directions for improved metrology and discusses these in the context of the application given.