Two Dimensional Semiconductor-Based Photonic Crystal Slab Waveguides for Ultra-Fast Optical Signal Processing Devices

Yoshimasa SUGIMOTO  Yu TANAKA  Naoki IKEDA  Kyozo KANAMOTO  Yusui NAKAMURA  Shunsuke OHKOUCHI  Hitoshi NAKAMURA  Kuon INOUE  Hidekazu SASAKI  Yoshinori WATANABE  Koji ISHIDA  Hiroshi ISHIKAWA  Kiyoshi ASAKAWA  

IEICE TRANSACTIONS on Electronics   Vol.E87-C   No.3   pp.316-327
Publication Date: 2004/03/01
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Section on Photonic Crystals and Their Device Applications)
photonic crystal,  photonic band gap,  slab waveguide,  photonic IC,  

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We have fabricated several two-dimensional photonic-crystal (2DPC) slab waveguides by using fine electron beam lithography and dry etching. The 2DPC waveguides include straight, bend, Y-branch, directional coupler, and coupled-cavity waveguides on the GaAs/AlGaAs substrate as an application to the ultra-small and ultra-fast all-optical switching device. Transmission spectra and near field patterns were characterized in a wide wavelength range from 850 to 1600 nm with the sample finished to the air-bridge type 2DPC slab. These waveguides appear to be suitable for achieving the waveguide platform in the symmetrical-Mach-Zehnder device.