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Two Dimensional Semiconductor-Based Photonic Crystal Slab Waveguides for Ultra-Fast Optical Signal Processing Devices
Yoshimasa SUGIMOTO Yu TANAKA Naoki IKEDA Kyozo KANAMOTO Yusui NAKAMURA Shunsuke OHKOUCHI Hitoshi NAKAMURA Kuon INOUE Hidekazu SASAKI Yoshinori WATANABE Koji ISHIDA Hiroshi ISHIKAWA Kiyoshi ASAKAWA
IEICE TRANSACTIONS on Electronics
Publication Date: 2004/03/01
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Section on Photonic Crystals and Their Device Applications)
photonic crystal, photonic band gap, slab waveguide, photonic IC,
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We have fabricated several two-dimensional photonic-crystal (2DPC) slab waveguides by using fine electron beam lithography and dry etching. The 2DPC waveguides include straight, bend, Y-branch, directional coupler, and coupled-cavity waveguides on the GaAs/AlGaAs substrate as an application to the ultra-small and ultra-fast all-optical switching device. Transmission spectra and near field patterns were characterized in a wide wavelength range from 850 to 1600 nm with the sample finished to the air-bridge type 2DPC slab. These waveguides appear to be suitable for achieving the waveguide platform in the symmetrical-Mach-Zehnder device.