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Application of a Digital Scanning Laser Microscope to 3-D Analysis of Contact Surface Damages
Makoto HASEGAWA Jiro MAKIMOTO Koichiro SAWA
IEICE TRANSACTIONS on Electronics
Publication Date: 2003/06/01
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Recent Development of Electro-Mechanical Devices (IS-EMD 2002))
Category: Discharges & Related Phenomena
electrical contacts, erosion, material transfer, scanning laser microscope,
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The authors have been interested in a Scanning Laser Microscope (SLM) and applied it to studies of contact phenomena. In particular, a digital SLM is being currently used, and confirmed to be a successful tool for investigating the contact phenomena. In this paper, the theory and mechanism of a digital SLM are briefly explained, and some actual data obtained with the digital SLM are presented for demonstrating its usefulness for studies of contact phenomena.