Fully Embedded Low Temperature Co-fired Ceramics (LTCC) Spiral Inductors for L-Band RF System-in-Package (SIP) Applications

Ki Chan EUN  Young Chul LEE  Byung Gun CHOI  Dae Jun KIM  Chul Soon PARK  

IEICE TRANSACTIONS on Electronics   Vol.E86-C    No.6    pp.1089-1092
Publication Date: 2003/06/01
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section LETTER (Special Issue on Devices and Circuits for Next Generation Multi-Media Communication Systems)
low temperature co-fired ceramics (LTCC),  spiral inductor,  Q-factor,  self-resonant frequency (SRF),  

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Fully embedded spiral inductors in a low loss dielectric multi-layer were designed and fabricated using a low temperature co-fired ceramics (LTCC) technology for RF SIP (system in package) integrations. The line width/space and the number of spiral layers were optimized within five layers of LTCC dielectric for high Q-factor, high self-resonant frequency (SRF), process easiness, and compact size. The embedded multi-layer spiral inductors reveal better performance in terms of Q-factor, SRF and the effective inductance Leff than planar spiral inductors of the same dimension and number of turns. The optimized multi-layer spiral inductor shows maximum Q of 56, Leff of 6.6 nH at Qmax and SRF of 3.6 GHz while planar spiral inductors have maximum Q of 49, Leff of 5.8 nH at Qmax and SRF of 3.0 GHz.