Single High-Order Transverse Mode Surface Emitting Laser with Micromachined Surface Relief

Satoshi SHINADA  Fumio KOYAMA  Nobuhiko NISHIYAMA  Masakazu ARAI  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E85-C   No.4   pp.995-1000
Publication Date: 2002/04/01
Online ISSN: 
DOI: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Recent Progress of Integrated Photonic Devices)
Category: Active Devices
Keyword: 
semiconductor laser,  surface emitting laser,  optical fiber communication,  transverse mode control,  far field pattern,  

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Summary: 
We demonstrate a single high-order transverse mode surface emitting laser (VCSEL) with narrow trenches formed on a top surface. The design and the fabrication of a single high-order mode 850 nm GaAs VCSEL with micromachined surface relief are presented. Stable single-mode operation with a side-mode suppression ratio of over 40 dB was obtained in an entire measured current range. We obtained the maximum single mode power of over 3.5 mW and a record low series resistance of below 50 Ω. In addition, a single-lobe far field pattern is demonstrated even under high-order transverse mode operation by loading phase-shift on the top surface. A coupling efficiency with optical fibers is dramatically improved.