Si-Based Photonic Crystals and Photonic-Bandgap Waveguides

Masaya NOTOMI
Akihiko SHINYA
Eiichi KURAMOCHI
Itaru YOKOHAMA
Chiharu TAKAHASHI
Koji YAMADA
Jun-ichi TAKAHASHI
Takayuki KAWASHIMA
Shojiro KAWAKAMI

Publication
IEICE TRANSACTIONS on Electronics   Vol.E85-C    No.4    pp.1025-1032
Publication Date: 2002/04/01
Online ISSN: 
DOI: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section INVITED PAPER (Special Issue on Recent Progress of Integrated Photonic Devices)
Category: New Devices
Keyword: 
photonic crystal,  photonic band gap,  waveguide,  photonic IC,  Si photonics,  

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Summary: 
We studied various types of 2D and 3D Si-based photonic crystal structures that are promising for future photonic integrated circuit application. With regard to 2D SOI photonic crystal slabs, we confirmed the formation of a wide photonic bandgap at optical communication wavelengths, and used structural tuning to realize efficient single-mode line-defect waveguides operating within the bandgap. As regards 3D photonic crystals, we used a combination of lithography and the autocloning deposition method to realize complicated 3D structures. We used this strategy to fabricate 3D full-gap photonic crystals and 3D/2D hybrid photonic crystals.