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Recovery Treatment for EuBa2Cu3O 7-δ Films with Insulating Multilayers
Hironori WAKANA Masaki FUJIBAYASHI Noriyoshi FUSHIMI Osamu MICHIKAMI
IEICE TRANSACTIONS on Electronics
Publication Date: 2002/03/01
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Superconductive Electronics)
Category: Thin Films and Materials
recovery treatment, EuBa2Cu3O 7 films, insulating multilayers, magnetron sputtering,
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By depositing insulating layers on oxide superconducting films, the films generally deteriorate. When an insulating multilayer of CeO2(50 )SrTiO3(200 ) was grown on 800--thick EuBa2Cu3O 7-δ (EBCO) films with Tce's (Tc endpoint) above 90 K, the films exhibited Tce's of about 40 K. Recovery of the deteriorated films was carried out by two treatment methods. A pure oxygen treatment, where the deteriorated films were annealed at a temperature (Tsa) of 550C and an oxygen pressure (PO2) of 100 kPa for 60 min, and then naturally cooled, restored the films with Tce's of about 60 K. An activated oxygen plasma (AOP) treatment, where the deteriorated films were exposed to oxygen plasma at a Tsa=550C for 40 min and subsequently oxygen gas was introduced into the chamber up to 2 kPa and then naturally cooled, restored the films with Tce's of about 84 K. The AOP-treated film was recovered with a cooling rate of less than 6.8C/min, and exhibited Tce of 90 K. The AOP-treated film took in oxygen more effectively than the pure oxygen-treated film with the cooling process at less than PO2=100 kPa.