Tunable External-Cavity Quantum-Well Laser Using Grating Coupler Integrated in Selectively Disordered Waveguide

Naoyuki SHIMADA  Katsuhiro YUTANI  Masahiro UEMUKAI  Toshiaki SUHARA  Anders LARSSON  

IEICE TRANSACTIONS on Electronics   Vol.E85-C   No.1   pp.79-84
Publication Date: 2002/01/01
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Recent Progress in Semiconductor Lasers and Light-Emitting Devices)
integrated optics,  external-cavity laser,  wavelength tuning,  grating couplers,  quantum-well disordering,  

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A tunable external-cavity InGaAs/AlGaAs quantum-well laser using a grating coupler monolithically integrated in a selectively disordered waveguide is demonstrated. The laser consists of an amplifier with a narrow channel for lateral single-mode guiding and a tapered section, a grating coupler for output beam collimation and wavelength dispersion, and an external half mirror. Selective quantum-well disordering technique using SiO2 caps of different thicknesses and rapid thermal annealing was employed to reduce the passive waveguide loss in the grating coupler region. Loss reduction from 40 cm-1 to 3 cm-1 was accomplished. Resultant increase of the grating coupler efficiency and expansion of the effective aperture length led to significant improvement of the laser performances. The maximum output power of 105 mW and wide tuning range of 21.1 nm centered at 997 nm were obtained. The well collimated output beam of full diffraction angles at half maximum of 0.16 0.18 was obtained.