128 96 Pixel FEA Image Sensor with HARP Target

Yoshiro TAKIGUCHI  Katsunori OSADA  Masakazu NANBA  Kazunori MIYAKAWA  Saburo OKAZAKI  Toshio YAMAGISHI  Kenkichi TANIOKA  Masahide ABE  Norifumi EGAMI  Mitsuru TANAKA  Shigeo ITOH  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E85-C   No.11   pp.1916-1921
Publication Date: 2002/11/01
Online ISSN: 
DOI: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Electronic Displays)
Category: FED Technologies
Keyword: 
image sensor,  field emitter array,  high sensitivity,  HARP,  

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Summary: 
To investigate the feasibility of a compact FEA image sensor with a large number of pixels, a 128 96 pixel FEA image sensor with a 4-µm-thick HARP target was fabricated and tested for the first time. The experimental results showed that the prototype could stably operate as a highly sensitive image sensor having both sufficient resolution corresponding to the number of pixels and a wide dynamic range, which demonstrated its potential as a next-generation image sensor.