Basic Studies of Fiber-Optic MEMS for Telecommunication Using Three Dimensional Micromachining

Kazuhiro HANE  Minoru SASAKI  JongHyeong SONG  Yohei TAGUCHI  Kosuke MIURA  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E84-C   No.12   pp.1785-1791
Publication Date: 2001/12/01
Online ISSN: 
DOI: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
Category: 
Keyword: 
optical communication system,  micro-electro-mechanical systems,  micromachining,  optical fiber components,  tunable optical devices,  

Full Text: PDF>>
Buy this Article




Summary: 
Fiber-optic MEMS which is fabricated by combining direct photo-lithography of optical fiber and silicon micro-machining is proposed. Preliminary results of micro-machining of optical fiber and variable telecommunication devices are presented.