Co-Cr-Ta/Pt Bilayered Films for Perpendicular Magnetic Recording Media

Atsushi SATO  Shigeki NAKAGAWA  Masahiko NAOE  

IEICE TRANSACTIONS on Electronics   Vol.E83-C   No.9   pp.1462-1466
Publication Date: 2000/09/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Selected Papers from the 4th Asian Symposium for Information Storage Technology)
Co-Cr-Ta/Pt bilayered film,  Pt seed layer,  perpendicular magnetic recording,  anomalous Hall effect,  

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Ferromagnetic Co77Cr20Ta3 layers were deposited on a Pt seed layer by a facing targets sputtering apparatus. The Co-Cr-Ta and Pt crystallites revealed better c-axis orientation at a substrate temperature Ts above 200C. Relatively high perpendicular coercivity Hc⊥ of 2.5 kOe was obtained for the bilayered film with a Co-Cr-Ta layer thickness, δCo, of 50 nm deposited at Ts of 250C. Although the Co-Cr-Ta/Pt medium with δCo of 100 nm exhibited lower recording density than a Co-Cr-Ta/Cr longitudinal one, its noise level became small at the high-density recording range. Measurement of the anomalous Hall voltage clarified that the bilayered film with δCo as small as 30 nm revealed larger perpendicular magnetization than the single layer. The Pt seed layer is effective for depositing thin ferromagnetic Co-Cr-Ta layers below 100 nm in thickness.