Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor

Kenichiro SUZUKI  Takefumi OGUMA  Tetsuji UEDA  Takashi SHIBUYA  

IEICE TRANSACTIONS on Electronics   Vol.E83-C    No.9    pp.1435-1440
Publication Date: 2000/09/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
tunable optical filter,  Fabry-Perrot,  capacitive pressure sensor,  boron-doped silicon,  micromachining,  

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A tunable optical Fabry-Perrot filter was designed by setting a single-mode optical fiber normal to the diaphragm of a capacitive pressure sensor. The silicon diaphragm is deflected by the electrostatic force generated by applying a voltage to the capacitive electrodes. According to the movement of the diaphragm, the peak wavelength changed from 1546 to 1551 nm when applied voltage was increased from 20 to 50 V. The relationship of the wavelength change to the applied voltage was derived from the silicon diaphragm deflection theory. That measured change of the wavelength agrees well with the wavelength change calculated from this relationship. The commercial pressure sensors are expected to be able to be used as a tunable optical filter.