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Application of Technology CAD in Process Development for High Performance Logic and System-on-Chip in IC Foundry
Boon-Khim LIEW Chih-Chiang WANG Carlos H. DIAZ Shien-Yang WU Jack Yuan-Chen SUN Yai-Fen LIN Di-Son KUO Hua-Tai LIN Anthony YEN
IEICE TRANSACTIONS on Electronics
Publication Date: 2000/08/25
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))
Category: Simulation Methodology and Environment
TCAD, CMOS device, flash, optical proximity correction,
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The application of Technology CAD simulations for development of IC processes in foundry is presented. Examples include device design, Flash cell design and optical proximity correction for SRAM cell. The challenges of using TCAD tools in the IC foundry is also discussed.