Monte Carlo Simulation of Sub-0.1µm Devices with Schottky Contact Model

Kazuya MATSUZAWA  Ken UCHIDA  Akira NISHIYAMA  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E83-C   No.8   pp.1212-1217
Publication Date: 2000/08/25
Online ISSN: 
DOI: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99))
Category: Device Modeling and Simulation
Keyword: 
Schottky contact,  Monte Carlo,  velocity dispersion,  hydrodynamic,  

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Summary: 
A Schottky contact model was implemented as a boundary condition for Monte Carlo device simulations. Unlike the ideal ohmic contact, the thermal equilibrium is unnecessary around the Schottky contact. Therefore, the wide region with high impurity concentration around the contact is not required to maintain the thermal equilibrium, which means that it is possible to avoid assigning a lot of particles to the low-field region. The validity of the present boundary condition for contacts was verified by simulating a rectifying characteristic of a Schottky barrier diode. As an application example using the present contact model, we simulated transport in n+nn+ structures with sub-0.1 µm channel lengths. We observed direction dependence of the electron velocity dispersion, which indicates that the direction dependence of the diffusion constant or the carrier temperature should be taken into account in the hydrodynamic simulation for sub-0.1 µm devices.