Colored Timed Petri-Nets Modeling and Job Scheduling Using GA of Semiconductor Manufacturing

Sin Jun KANG  Seok Ho JANG  Hee Soo HWANG  Kwang Bang WOO  

IEICE TRANSACTIONS on Information and Systems   Vol.E82-D   No.11   pp.1483-1485
Publication Date: 1999/11/25
Online ISSN: 
Print ISSN: 0916-8532
Type of Manuscript: LETTER
Category: Algorithm and Computational Complexity
Colored Timed Petri-Nets,  genetic algorithm,  heuristic job scheduling,  semiconductor manufacturing system,  

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In this paper, an effective method of system modeling and dynamic scheduling to improve operation and control for the Back-End process of semiconductor manufacturing is developed by using Colored Timed Petri-Nets (CTPNs). The simulator of a CTPNs model was utilized to generate a new heuristic scheduling method with genetic algorithm(GA) which enables us to obtain the optimal values of the weighted delay time and standard deviation of lead time.