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Colored Timed Petri-Nets Modeling and Job Scheduling Using GA of Semiconductor Manufacturing
Sin Jun KANG Seok Ho JANG Hee Soo HWANG Kwang Bang WOO
IEICE TRANSACTIONS on Information and Systems
Publication Date: 1999/11/25
Print ISSN: 0916-8532
Type of Manuscript: LETTER
Category: Algorithm and Computational Complexity
Colored Timed Petri-Nets, genetic algorithm, heuristic job scheduling, semiconductor manufacturing system,
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In this paper, an effective method of system modeling and dynamic scheduling to improve operation and control for the Back-End process of semiconductor manufacturing is developed by using Colored Timed Petri-Nets (CTPNs). The simulator of a CTPNs model was utilized to generate a new heuristic scheduling method with genetic algorithm(GA) which enables us to obtain the optimal values of the weighted delay time and standard deviation of lead time.