Automated Millimeter-Wave On-Wafer Testing System

Takayuki KATOH
Hiroyuki HOSHI

IEICE TRANSACTIONS on Electronics   Vol.E82-C    No.7    pp.1312-1317
Publication Date: 1999/07/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Microwave and Millimeter Wave Technology)
Category: Measurements
millimeter wave,  S-parameter,  noise figure,  MMIC,  on-wafer measurement,  

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A novel millimeter-wave on-wafer CAT(Computer-Aided-Testing ) system has been developed for measurement of S-parameters and NF ( Noise figure ). For the S-parameter test system, we have developed a holder setup and installed it in a semi-automatic wafer prober so that the waveguide-based T/R module can be directly connected to a probe-head through fixed waveguides, which feature low insertion loss of less than 2 dB, from 75 GHz to 98 GHz. The accuracy of the developed test system was confirmed by measuring, with this system, a co-planar offset short pattern then comparing measured and simulated results. A good agreement between the measured and calculated, in both return loss and return phase successfully demonstrated the superiority of the system. A W-band NF test system with a system noise of less than 8 dB has been also developed to provide an on-wafer NF measurement capability with an accuracy of 0.3 dB. These S-parameter and NF test systems possess great advantages to achieve high-speed automatic MMIC testing up to W-band.