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A New Characterization Method for Accurate Capacitor Matching Measurements Using Pseudo-Floating Gate Test Structures in Submicron CMOS and BICMOS Technologies
Olivier ROUX dit BUISSON Gerard MORIN Frederic PAILLARDET Eric MAZALEYRAT
IEICE TRANSACTIONS on Electronics
Publication Date: 1999/04/25
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Microelectronic Test Structures)
capacitor matching, CMOS, BiCMOS, pseudo-floating gate test structure,
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In deep submicron CMOS and BICMOS technologies, antenna effects affect floating gate charge of usual floating gate test structures, dedicated to capacitor matching measurement. In this paper a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, testing method and results are given for several capacitor layouts (poly-poly and metal-metal).