A New Characterization Method for Accurate Capacitor Matching Measurements Using Pseudo-Floating Gate Test Structures in Submicron CMOS and BICMOS Technologies

Olivier ROUX dit BUISSON  Gerard MORIN  Frederic PAILLARDET  Eric MAZALEYRAT  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E82-C   No.4   pp.624-629
Publication Date: 1999/04/25
Online ISSN: 
DOI: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: 
Keyword: 
capacitor matching,  CMOS,  BiCMOS,  pseudo-floating gate test structure,  

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Summary: 
In deep submicron CMOS and BICMOS technologies, antenna effects affect floating gate charge of usual floating gate test structures, dedicated to capacitor matching measurement. In this paper a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, testing method and results are given for several capacitor layouts (poly-poly and metal-metal).