A Complete Methodology for Electro-Mechanical Characterization of a CMOS Compatible MEMS Technology

Laurent LATORRE  Pascal NOUET  

IEICE TRANSACTIONS on Electronics   Vol.E82-C   No.4   pp.582-588
Publication Date: 1999/04/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Microelectronic Test Structures)
Micro-Electro-Mechanical Systems,  Monolithic integration,  characterization,  analytical modeling,  

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In this paper we present a complete methodology for efficient electro-mechanical characterization of a CMOS compatible MEMS technology. Using an original test structure, the so-called "U-shape cantilever beam," we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electro-mechanical relations for the design of Microsystems have also been developed.