Improving the Sensitivity of H-Type LiTaO3 Piezoelectric Crystal Gyroscopes

Noboru WAKATSUKI  Hiroshi TANAKA  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E82-C   No.1   pp.60-65
Publication Date: 1999/01/25
Online ISSN: 
DOI: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Electromechanical Devices and Their Materials)
Category: 
Keyword: 
piezoelectric gyroscope,  LiTaO3,  angular rate sensor,  bending resonator,  

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Summary: 
We propose and experimentally confirm two approaches to improve the sensitivity of the H-type piezoelectric crystal gyroscope of LiTaO3. One is to adjust the resonant frequencies of the fz mode through additional mass control; the other is to change the driving mode from fx mode to fz mode, while the driving frequency is the resonant frequency of the fx mode. The sensitivity of the unit driving voltage is almost the same, but the threshold driving voltage level may increase more than 1,000 times, because it is far from the mechanical resonance. The high sensitivity of 0.11 pC (deg/sec) was obtained at a driving voltage of 30 Vpp.