A High-Resolution Measurement System for Surface Profile of Electric Contact

Yasuo EBARA  Hideaki SONE  Yoshiaki NEMOTO  Tasuku TAKAGI  

IEICE TRANSACTIONS on Electronics   Vol.E81-C    No.3    pp.432-434
Publication Date: 1998/03/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section LETTER (Special Issue on Electromechanical Devices and their Surface Science)
electric contact,  surface profile measurement,  focal length,  high-resolution,  

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We discussed on relationship between the width of slit ray and the accuracy of the measurement system for surface profile of electric contact. To obtain resolution of 10 [µm], we designed the mechanism which keeps constant the focal length between the object and the lens. As a result, the width of slit ray was clear in the whole surface. A section image could measured exactly and enhanced the resolution.