Applications of a High Density LED Array Unit Fabricated on a Silicon Microreflector


IEICE TRANSACTIONS on Electronics   Vol.E80-C    No.2    pp.285-290
Publication Date: 1997/02/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Micromachine Technology)
Category: Optical Application
LED,  silicon etching,  reflector,  isolated power unit,  display,  

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A light emitting diode (LED) array unit for use as a light source in isolated power transmission and a display panel was fabricated using LED chips mounted on a silicon microreflector. The reflector was formed on a (100) silicon wafer by anisotropic chemical etching. An isolated power supply consisting of an infrared LED array unit and single silicon crystal solar cells had a maximum transmission efficiency of 2.3%. The silicon microreflector absorbs the heat generated by the LED chips and improves their light directive characteristics. A small, high-resolution, full color LED display panel can also be constructed using LED array units fabricated on silicon microreflectors. The LEDs in a unit are arrayed with a matrix structure and the electric contacts between the LED chips, the reflector and the upper cover glass are formed using conducting silver resin.