Capacitive Pressure Sensor with Center Clamped Diaphragm

Toshihiko OMI  Kenji HORIBATA  Fumihiko SATO  Masashi TAKEUCHI  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E80-C   No.2   pp.263-268
Publication Date: 1997/02/25
Online ISSN: 
DOI: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Micromachine Technology)
Category: Sensor
Keyword: 
capacitance,  pressure sensor,  linearity,  diaphragm,  micromachining,  

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Summary: 
A new silicon capacitive pressure sensor with center clamped diaphragm is presented. The sensor has a silicon-glass structure and is fabricated by batch-fabrication processes. Since deformed diaphragm has a doughnut-shape, parallel-like displacement is realized and therefore better linearity of 0.7% which is half of the conventional flat diaphragm sensor is obtained. It is clarified both analytically and experimentally that the capacitive pressure sensor with center clamped diaphragm is advantageous in terms of linearity.