For Full-Text PDF, please login, if you are a member of IEICE,|
or go to Pay Per View on menu list, if you are a nonmember of IEICE.
Thermally Controlled Magnetization Actuator for Microrelays
Etsu HASHIMOTO Hidenao TANAKA Yoshio SUZUKI Yuji UENISHI Akinori WATABE
IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Micromachine Technology)
relay, latching, magnetization, electroplating,
Full Text: PDF>>
A thermally controlled magnetization actuator (TCMA) is proposed for micro-mechanical relays. It is actuated by changing the local magnetization of the structure by remote heating using a laser beam. It is fabricated by nickel surface micromachining (a fabrication technique using nickel electroplating). The optical power of the laser diode used to drive the TCMA is about 30 mW. The switching time of the microrelay was experimentally measured to be 10 ms, the same as that of a conventional mechanical relay. The contact force was calculated to be 20 µN, which can be improved by increasing the size of the TCMA.