Basic Properties of Magnetostrictive Actuators Using Tb-Fe and Sm-Fe Thin Films

Takashi HONDA  Ken Ichi ARAI  Masahiro YAMAGUCHI  

IEICE TRANSACTIONS on Electronics   Vol.E80-C    No.2    pp.232-238
Publication Date: 1997/02/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Micromachine Technology)
Category: Actuator
magnetostriction,  Tb-Fe thin film,  Sm-Fe thin film,  wireless remote operation,  cantilever,  walking mechanism,  

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A new magnetostrictive thin-film cantilever actuator and a new thin-film walking mechanism were developed. The actuators were made of magnetostrictive amorphous Tb-Fe and Sm-Fe thin films, deposited on the opposite sides of a polyimide film substrate. These actuators need not power supply cables because they were remotely driven by external magnetic fields. The static deflection of a 3-mm-long cantilever actuator was as large as 100 µm at 300 Oe field. Moreover the application of ac resonant frequency field of the same intensity yielded deflection of above 500 µm. The walking mechanism ran as fast as in the order of cm/s. The forward and backward running were possible depending on the frequency of applied magnetic field. Such unique characteristics suggest that magnetostrictive thin-film actuators are useful in MEMS applications.