Surface Micromachined Micro-Opto-Electro-Mechanical Systems

Victor M. BRIGHT  John H. COMTOIS  J. Robert REID  Darren E. SENE  

IEICE TRANSACTIONS on Electronics   Vol.E80-C   No.2   pp.206-213
Publication Date: 1997/02/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Issue on Micromachine Technology)
MEMS,  micromachining,  micromirror,  micro-optics,  micro actuator,  

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The growing availability of commercial foundry processes allows easy implementation of micro-opto-electro-mechanical systems (MOEMS) for a variety of applications. Such applications go beyond single devices to include whole optical systems on a chip, consisting of mirrors, gratings, Fresnel lenses and shutters, for example. Hinged and rotating structures, combined with powerful and compact thermal actuators, provide the means for positioning and operating these optical components. This paper presents examples of such systems built in a commercial polycrystalline silicon surface-micromachining process, the ARPA-sponsored Multi-User MEMS ProcesS (MUMPS). Examples range from optical sub-components to large mirror arrays, communication components, and micro-interferometers. Using the examples discussed in this paper, a designer can take advantage of commercially available surface-micromachining processes to design and develop MOEMS without the need for extensive in-house micromachining capabilities.