Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability

Mitsuo ICHIYA  Takuro NAKAMURA  Shuji NAKATA  Jacques LEWINER  

IEICE TRANSACTIONS on Electronics   Vol.E80-C   No.1   pp.174-183
Publication Date: 1997/01/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: PAPER
Category: Components
microsystems,  sensors,  actuators,  electrostatic field,  electret,  silicon dioxide,  charge stability,  thermally stimulated current,  

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Micromachined sensors and actuators applied with electrostatic fields are getting widely developed. At the same time, "electrets," which are dielectrics carrying non-equilibrium permanent space charges or polarization distribution, are in demand because they improve the transducer characteristics. In this paper, we have reported on our successful fabrication of silicon dioxide electrets with extremely superior long-term charge stability by plasma chemical vapor deposition (PCVD). We have also reported on the correlation between the deposition conditions, the long-term charge stability and thermally stimulated current (TSC). Finally, the characterization of the long-term stable electrets will be described and discussed.