Optimization of the Numbers of Machines and Operators Required for LSI Production

Kazuyuki SAITO  

IEICE TRANSACTIONS on Electronics   Vol.E79-C   No.8   pp.1112-1119
Publication Date: 1996/08/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: PAPER
Category: Integrated Electronics
integrated electronics,  VLSI,  manufacturing system,  facility design,  queueing model,  

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This paper concerns optimized facility design for VLSI production. The methods proposed are applicable in planning LSI production facilities with a good balance between the number of machines and the number of operators. The sequence in each processing step is analyzed in detail. A new algorithm based on the queueing model is developed for estimating the simultaneous requirements for the two kinds of resources, machines and operators. This estimation system can be applied to complicated fabrication schemes, such as batch processing, continuous processing, and mixed technologies. This methodology yields guidelines for ASIC LSI production system design.