Dry-Released Nickel Micromotors with Low-Friction Bearing Structure

Toshiki HIRANO  Tomotake FURUHATA  Hiroyuki FUJITA  

IEICE TRANSACTIONS on Electronics   Vol.E78-C   No.2   pp.132-138
Publication Date: 1995/02/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)
micromotor,  electroplating,  friction,  diamond-like carbon,  

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A new electrostatic wobble motor design and fabrication method were proposed, and micromotors were successfully fabricated and operated. The advantages are (1) thicker structural size, resulting in larger torque, (2) simple and safe fabrication process and (3) needle-shaped bearing to support the rotor. Needle-shaped bearing used here is expected to have lower friction comparing with the existing motor, since the load is smaller for this kind of bearing structure. Two major sources of the load, electrostatic force and capillary force, were considered to prove this tendency. Diamond-like Carbon (DLC) film was employed as a solid lubricant for its bearing. The friction of DLC and that of ilicon-dioxide were compared by experiment.