Data Retention Characteristics of Flash Memory Cells after Write and Erase Cycling

Seiichi ARITOME  Riichiro SHIROTA  Koji SAKUI  Fujio MASUOKA  

IEICE TRANSACTIONS on Electronics   Vol.E77-C   No.8   pp.1287-1295
Publication Date: 1994/08/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on High Speed and High Density Multi Functional LSI Memories)
Category: Non-volatile Memory
flash EEPROM,  data retention,  endurance,  tunnel oxide,  electron traps,  

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The data retention characteristics of a Flash memory cell with a self-aligned double poly-Si stacked structure have been drastically improved by applying a bi-polarity write and erase technology which uses uniform Fowler-Nordheim tunneling over the whole channel area both during write and erase. It is clarified experimentally that the detrapping of electrons from the gate oxide to the substrate results in an extended retention time. A bi-polarity write and erase technology also guarantees a wide cell threshold voltage window even after 106 write/erase cycles. This technology results in a highly reliable EEPROM with an extended data retention time.