A Measurement Method of Complex Permittivity at Pseudo Microwave Frequencies Using a Cavity Resonator Filled with Dielectric Material


IEICE TRANSACTIONS on Electronics   Vol.E77-C   No.6   pp.894-899
Publication Date: 1994/06/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Measurement Techniques for Microwave/Millimeter Wave)
measurement of complex permittivity,  cavity resonator,  pseudo microwave frequency,  dielectric substrate,  sapphire (Al2O3),  alumina (Al2O3),  mullite (3Al2O3・2SiO2),  

Full Text: PDF(463.8KB)>>
Buy this Article

This paper describes a nondestructive measurement method for complex permittivity of dielectric material at pseudo microwave frequencies. The resonator used in this study has a cylindrical cavity filled with a sapphire material of a well known complex permittivity. The resonator is divided into two parts at the center. A dielectric substrate specimen is clamped with these halves. Relative permittivity εand loss tangent tan δ of the specimen are obtained at 3 GHz using the TE011 resonance mode. The accuracy of the present method is evaluated through the comparison of the measured values by the new method with those at around 10 GHz by the conventional empty cavity resonator method. The errors of measurements are smaller than 1% and 1105 for εand tan δ, respectively.