E-Beam Static Fault Imaging with a CAD Interface and Its Application to Marginal Fault Diagnosis

Norio KUJI  Kiyoshi MATSUMOTO  

IEICE TRANSACTIONS on Electronics   Vol.E77-C    No.4    pp.552-559
Publication Date: 1994/04/25
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on LSI Failure Analysis)
E-beam testing,  fault diagnosis,  marginal fault,  fault image,  fault tracing,  

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A new image-based diagnostic method is proposed for use with an E-beam tester. The method features a static fault imaging technique and a navigation map for fault tracing. Static Fault imaging with a dc E-beam enables the fast acquisition of images without any additional hardware. Then, guided by the navigation map derived from CAD data, marginal timing faults can be easily pinpointed. A statistical estimation of the average count of static fault images for various LSI circuits shows that the proposed method can diagnose marginal faults by observing less than thirty faulty images and that a faulty area can be localized with up to five times fewer observations than with the guided-probe method. The proposed method was applied to a 19k-gate CMOS-logic LSI circuit and a marginal timing fault was successfully located.