Summary: A sputtering system using dc hollow cathode discharge was developed for the propose of high Tc superconducting devices. Using this system, as-grown superconducting thin films of YBCO have been formed on MgO and SrTiO3 substrates. Influence of the sputtering conditions such as the substrate temperature and discharge gas pressure on the Tc and lattice parameter was investigated. It was found that superconducting films on MgO with Tc・zero higher than 87 K ere routinely obtained at the pressure of 820 mTorr (5%O2) and substrate temperature of 700 during deposition. The a/b-axis and c-axis oriented YBCO-PBCO hetero-structures were also successfully formed on MgO and SrTiO3 substrates.