A Recycling Scheme for Layout Patterns Used in an Old Fabrication Technology

Yuji SHIGEHIRO  Isao SHIRAKAWA  

Publication
IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences   Vol.E76-A   No.6   pp.886-893
Publication Date: 1993/06/25
Online ISSN: 
DOI: 
Print ISSN: 0916-8508
Type of Manuscript: Special Section PAPER (Special Section on Papers Selected from 1992 Joint Technical Conference on Circuits/Systems,Computers and Communications (JTC-CSCC'92))
Category: Algorithms for VLSI Design
Keyword: 
VLSI,  fabrication technology,  mask pattern,  layout description,  

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Summary: 
When a new fabrication process is set up, especially in layout design for functional cells, of practical importance is how to make the best use of layout resources so far accumulated in old fabrication processes. Usually layout data of each element are expressed mostly in terms of positional coordinate values, and hence it is extremely tedious to modify them at every change of design rules for a new fabrication technology. To cope with this difficulty, the present paper describes an automatic recycling scheme for layout resources accumulated dedicatedly for functional cell generation. The main subject of this scheme is to transform given layout data into a layout description format expressed in layout parameters. Once layout data are parameterized, layout patterns of functional cells can be reconstructed simply by tuning up parameters in accordance with a new set of design rules. A part of implementation results are also shown.